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Conference ProceedingsOPEN ACCESS

Surface treatment of indium-tin-oxide films via plasma immersion ion implantation

Solid-State and Organic Lighting, SOLED 2012 (2012)
DOI: 10.1364/soled.2012.lm4a.3
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Abstract

Indium-tin-oxide (ITO) transparent conducting films were treated by plasma immersion ion implantation (PIII) with various working gases. The results indicated a relative work function enhancement and an improvement of transmittance after PIII treatment.

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Liang, R., Ou, Q., & He, L. (2012). Surface treatment of indium-tin-oxide films via plasma immersion ion implantation. In Solid-State and Organic Lighting, SOLED 2012. Optical Society of America (OSA). https://doi.org/10.1364/soled.2012.lm4a.3

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