Abstract
In this work we consider a sensing strategy using dynamic bifurcations in MEMS resonators. We examine the statistics of jump events that occur as a result of a linear parameter sweep through a subcritical pitchfork bifurcation in a parametrically driven MEMS resonator in the presence of noise. The statistics of jump events are compared to those derived from a simple one-dimensional model and are found to have good agreement. Issues related to how system and input parameters affect these statistics are described, and sweeping strategies that lead to precise, fast estimates of the bifurcation point, as essential for these sensors, are derived. It is shown that for a typical MEMS resonator an optimal sweep rate exists, and noise may need to be added to achieve optimal sensitivity.
Cite
CITATION STYLE
Burgner, C. B., Turner, K. L., Miller, N. J., & Shaw, S. W. (2010). Parameter sweep strategies for sensing using bifurcations in mems. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 130–133). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2010.36
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