Design and Simulation of MEMS Based Piezoelectric Shear Actuated Beam

Abstract

Now-a-days, there has been growing demand for the development of micro scale devices, due to its less cost, space requirements, high dimensional stability and especially manufacturing time. This paper reports the modeling of MEMS based Piezoelectric shear actuated beam by using COMSOL Multiphysics software of version 4.2a.The dimensions of the model beam is of 100-mm long, 30-mm width, 10-mm thickness. In this paper, we analysed the deflection of beam under different voltages. In the first step, deflection of beam is analysed by changing the material of sandwiched beam. In the second step deflection of beam is explored by changing material of electrodes. In the third step, deflection of beam is analysed by changing both materials of sandwiched beam and electrodes. In the final step defection of beam is explored by changing both thickness and material of electrodes. Finally, the results of analysis allowed to conclude us to design a piezo electric shear actuated beam with different ranges and resolutions, under the condition of changing both thickness and material of electrodes gives the optimum deflection of 216nm under 30v excited input voltage.