Microfabrication of ceramics based on colloidal suspensions and photoresist masks

Abstract

Thick film ceramic microstructures with cross sectional areas of 5 by 10 μm2 were fabricated by casting aqueous colloidal suspensions of fine ceramic powders into photoresist structures. In order to anneal the ceramic microstructures without damaging, the dissolving behaviour of novolak resist was empirically assessed for different solvents. As a result, the resist was dissolved in tetrahydrofurane before pyrolysis. The processing of ceramic powders in the form of suspensions as used for bulk ceramic parts is new to the field of microfabrication.