Numerical and experimental analysis of thermal-flow characteristics in a pyrolysis reactor of a gas scrubber designed based on similitude theory

Abstract

With the continuous development of the semiconductor industry, interest in the technology for treating various pollutant gases in the semiconductor fabrication process has increased recently. Various gas scrubbers are being used to remove the pollutant gas from the processes. An efficient design of the pyrolysis reactor is crucial in a scrubber system due to the effective removal of pollutant sources and the overall operation stability. In this study, the thermal and flow characteristics in the reactor were examined through experiments and numerical analysis using a small-scale model of simplified pyrolysis reactor. Furthermore, a prototype model of pyrolysis reactor was designed through analysis result of small-scale model based on the similitude theory. The results of this study can be used as basic data for analyzing thermal and flow characteristics in a variety of scrubber systems. Implications: This study investigated and suggested a methodology for designing a pyrolysis reactor of the gas scrubber to overcome the design failure by using the concept of similarity, which can use the results from one system to explain phenomena in another system. We believe that our study makes a significant contribution to the literature because it provides a way to improve the performance of the gas scrubbers and test this performance with a smaller scalable model. And, we expect this study to be used as basic data when applying innovative and new design proposals in various industries.