Comparison of plasma parameters and optical emission in DC, HIPIMS and hybrid DC+HIPIMS modes of magnetron sputtering

Abstract

Experimental studies of the parameters of the plasma of a magnetron discharge and optical radiation from plasma in the regime of direct current (DC), high-current mode (HIPIMS), and hybrid (DC+HIPIMS) mode for a copper cathode 100 mm in diameter were carried out. The hybrid mode of operation of the magnetron sputtering system was carried out by means of a matching unit of two power supplies APEL-M-5HIPIMS and APEL-M-5PDC. The results of the experiments showed that the plasma concentration at a distance of 120 mm from the cathode has maximum values (5.6•1011 cm-3) in the HIPIMS regime at a frequency of 500 Hz. Measurement of the optical emission spectra for a copper cathode in an argon plasma showed, that at the same average discharge power (500 W), the intensity of the copper ion lines in the high-current and hybrid modes is 3 and 1.5 times, respectively, more than in the DC regime.