Fully batch-fabricated linear quadrupole mass filters

Abstract

We report the design, fabrication, and characterization of a fully batch-fabricated linear quadrupole mass filter. The device demonstrates for the first time, a microfabricated quadrupole mass filter that doesn’t require any post-fabrication electrode assembly. Utilizing a design with non-conventional square electrodes, a 30 mm quadrupole with an effective electrode diameter of ~1.7 mm, and integrated ion optics was fabricated. At a driving frequency of 2 MHz and a maximum applied voltage of 100 V, a mass range of 250 a.m.u. was achieved in the first stability region, and a half-height peak-width of 0.7 a.m.u. was obtained in the second stability region at mass 28.