Effects of a micro pattern on Cu alloy electrodeposition and its application as an oil detector

Abstract

In this study, the effects of open area ratio (OAR) variations by micro-patterns on Cu alloy electrodeposition were analyzed experimentally. To change the OAR of the samples, a strip-type micro-pattern was formed on a substrate through a photolithography process. Moreover, the OAR was controlled by adjusting the distance of the stripe pattern to a width of 20 μm. When electrodeposition was applied on a non-patterned substrate with an OAR of 100%, a pillar-type Cu alloy structure was produced. In addition, when the OAR was decreased to 40%, the height of the Cu alloy structures was increased. However, when the OAR was decreased to 20%, no electrodeposited structures were formed. To confirm the industrial effectiveness of the electrodeposited structures on a micro-pattern, the Cu alloy electrodeposited structures were applied to the formation of an oil detector.