Temperature Coefficient of Electronic Polarizability in Thin Polymer Films Deposited on Si and SiO2 Substrates Determined via Spectroscopic Ellipsometry

Abstract

Ellipsometry is widely used to determine the thermo-optical properties of thin polymer films. However, if the thermo-optic coefficient (TOC) and the linear thermal expansion coefficient (LTEC) are to be used to determine the temperature coefficient of electronic polarizability (TCEP) in thin polymer films, their values must be determined with the greatest possible accuracy, as both have the opposite effect. In this article, we analyze changes in ellipsometric parameters resulting from changes in the thin film temperature in order to develop a data analysis method for temperature-dependent spectroscopic ellipsometry that will facilitate the accurate determination of thermo-optical parameters, including the TCEP, in polymer thin films. As practical application examples, we identified optimal spectral windows to accurately determine the thermo-optical parameters of 50 to 150 nm-thick PMMA thin films deposited on Si and SiO2 substrates. The influence of thin-film thickness on the accuracy of TOC and LTEC determination is discussed.