Quantum cascade laser absorption spectroscopy - A new method to study molecular plasma components

Abstract

The recent development of quantum cascade lasers (QCLs) offers an attractive new option for the monitoring and control of industrial plasma processes and for trace-gas analysis as well as for highly time-resolved studies on the kinetics of plasma processes. The contribution reviews selected examples of the application of QCLs for infrared absorption studies in basic research and for plasma monitoring and control in industry. © 2010 IOP Publishing Ltd.