Abstract
We deploy multifunctional integrated sensors (MFISES) as a sensing platform in five applications and quantify their performance requirements for: weather stations, indoor climate control, parking monitoring, road activity monitoring, and chemical sensing. MFISES combines temperature, humidity, pressure, air speed, chemical gas, magnetic, and acceleration sensing in an encapsulated fabrication process to yield 2x2 mm sensor die. We compare the measurement resolution, range, and bandwidth of MFISES to application requirements to demonstrate the utility of integrated sensor platforms in a wide range of monitoring situations.
Cite
CITATION STYLE
Roozeboom, C. L., Hill, B. E., Hong, V. A., Ahn, C. H., Ng, E. J., Yang, Y., … Pruitt, B. L. (2014). Multifunctional integrated sensor monitoring. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 447–448). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2014.121
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