Demonstration of normally OFF beta-gallium oxide monolithic bidirectional switch for AC switching applications

Abstract

In this work, we report on the beta-gallium oxide (β-Ga2O3) monolithic bidirectional switch. The as-fabricated switch works on enhancement mode operation with a threshold voltage of ∼4 V. Maximum drain current density of 1.93 mA/mm is obtained with a drain voltage of 5 V. The bidirectional switch in a bidirectional mode has an ON/OFF current ratio of ∼107 with ON-resistance of 1.11 and 1.09 kΩ · mm in forward and reverse direction, respectively. However, in diode mode, the device shows an ON/OFF current ratio of 1.6 × 108 and 1.4 × 108 in forward and reverse conduction modes, respectively. The fabricated β-Ga2O3 monolithic bidirectional switch is then used to chop a 60 Hz Alternating Current signal at a chopping frequency of 1 kHz, indicating its potential applications in a range of converters.