A Study of the Properties of CuInS 2 Thin Film by Sulfurization

Abstract

The copper indium disulfide (CuInS2 ) thin film was manufactured using sputtering and thermal evaporation methods, and the annealing with sulfurization process was used in the vacuum chamber to the substrate temperature on the glass substrate, the annealing temperature and the composition ratio, and the characteristics thereof were investigated. The CuInS2 thin film was manufactured by the sulfurization of a soda lime glass (SLG) Cu/In/S stacked [1] elemental layer deposited on a glass substrate by vacuum chamber annealing [2] with sulfurization for various times at a temperature of substrate temperature of 200°C. The structure and electrical properties of the film was measured in order to determine the optimum conditions for the growth of CuInS2 ternary compound semiconductor CuInS2 thin films with a non-stoichiometric composition. The physical properties of the thin film were investigated under various fabrication conditions [3,4], including the substrate temperature, annealing temperature and annealing time by X-ray diffraction (XRD), field Emission scanning electron microscope (FE-SEM), and Hall measurement systems. [5] The sputtering rate depending upon the DC/RF power was controlled so that the composition ratio of Cu versus In might be around 1:1, and the substrate temperature affecting the quality of the film was varied in the range of room temperature (RT) to 300°C at intervals of 100°C, and the annealing temperature of the thin film was varied RT to 550°C in intervals of 100°C.