Sensing performance of precisely ordered TiO2 nanowire gas sensors fabricated by electron-beam lithography

Abstract

In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R0to 0.1 R0) of 3.2/17.5 s and a corresponding sensor response (ΔR/R0) of 21.7% at an ethanol injection mass quantity of 0.2 μg. © 2013 by the authors; licensee MDPI, Basel, Switzerland.