Integrated Glass Microfluidics with Electrochemical Nanogap Electrodes

Abstract

We present a framework for the fabrication of chip-based electrochemical nanogap sensors integrated with microfluidics. Instead of polydimethylsiloxane (PDMS), SU-8 aided adhesive bonding of silicon and glass wafers is used to implement parallel flow control. The fabrication process permits wafer-scale production with high throughput and reproducibility. Additionally, the monolithic structures allow simple electrical and fluidic connections, alleviating the need for specialized equipment. We demonstrate the utility of these flow-incorporated nanogap sensors by performing redox cycling measurements under laminar flow conditions.