In-chip direct laser writing of a centimeter-scale acoustic micromixer

Abstract

© The Authors. A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20 μm × 20 μm × 155 μm acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30 μms-1. The fabrication method allows for large flexibility and more complex designs.