Ultra-small metal particle arrays produced by high resolution electron-beam lithography

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Abstract

Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.

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Craighead, H. G., & Mankiewich, P. M. (1982). Ultra-small metal particle arrays produced by high resolution electron-beam lithography. Journal of Applied Physics, 53(11), 7186–7188. https://doi.org/10.1063/1.331614

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