Investigation and analysis of the influence of excitation signal on radiation characteristics of capacitive micromachined ultrasonic transducer

Abstract

CMUT based on micro-electro-mechanical systems technology has a significant advantage that traditional piezoelectric ultrasonic transducers do not have, and has become the mainstream transducer for the new generation of ultrasound imaging systems. In this paper, the state equation is deduced and the analysis model is established in SIMULINK environment based on the lumped parameter system model of the CMUT micro-unit. Through the state equation-SIMULINK model, the influence of the parameters such as the DC bias voltage, the amplitude, frequency and period number of the AC excitation signal on the radiation characteristics is analyzed comprehensively. These results provide the important theoretical basis and reference for further optimization of structural design and application testing in the future.