Abstract
Oxidation behavior of sintered AIN by oxygen and water vapor was studied at 1400°C for the purpose of surface treatment. The partial pressure of oxygen, Po(2) was controlled at 10-10 and 10 kPa, and that of water vapor, PH(2)n was changed at 5.0 × 10-2 to 8.5 kPa. The oxidation product detected by XRD was α-Al2O3. Oxidation rate was increased with increasing PH(2)o. The weight gain with time by oxygen was parabolic, and that by water vapor was linear. The Al2O3 layer formed by the oxidation of sintered AIN with oxygen was relatively dense, and coherent. The oxidation kinetics were discussed using the mixed-control rate equation on the basis of unreacted-core model.
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CITATION STYLE
Kuromitsu, Y., Yoshida, H., Ohno, S., Masuda, H., Takebe, H., & Morinaga, K. (1992). Oxidation of sintered aluminum nitride by oxygen and water vapor. Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, 100(1157), 70–74. https://doi.org/10.2109/jcersj.100.70
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