CHARIOT: Software tool for modeling SEM signal and e-beam lithography

Abstract

An advanced Monte Carlo software tool CHARIOT was developed to simulate image formation in SEM, energy deposition in EBL, electron spectra, and charging of a target. Scattering of an electron beam in a microstructure, generation of secondary electrons, and characteristics of the detector, as well as the material and shape of the features, determine electron scattering and a SEM signal. Physical and mathematical models are described to comply with an accuracy required by modern technology, especially at low voltage electrons. Examples of applications to CD-SEM, defect inspection, EBL, and electron spectrometer are presented. © 2008 Elsevier B.V. All rights reserved.