A Fluidic Vibrational Energy Harvester for Implantable Medical Device Applications

Abstract

In this paper, we report on a proof-of-concept level energy harvester device that could earn electric power of 0.093 μW/cm2 by the fluidic motion in a polydimethylsiloxane microfluidic channel placed on a silicon substrate with built-in permanent electrical charges or so-called electrets. Targeting implantable medical devices such as respiratory pacemaker, the heart beat or aspiration is thought to be the source of motion as a final shape of the energy harvesting system.