Self-Powered and Autonomous Vibrational Wake-Up System Based on Triboelectric Nanogenerators and MEMS Switch

Abstract

With the extensive application of wireless sensing nodes, the demand for sustainable energy in unattended environments is increasing. Here, we report a self-powered and autonomous vibrational wake-up system (SAVWS) based on triboelectric nanogenerators and micro-electromechanical system (MEMS) switches. The energy triboelectric nanogenerator (E-TENG) harvests vibration energy to power the wireless transmitter through a MEMS switch. The signal triboelectric nanogenerator (S-TENG) controls the state of the MEMS switch as a self-powered accelerometer and shows good linearity in the acceleration range of 1–4.5 m/s2 at 30 Hz with a sensitivity of about 14.6 V/(m/s2). When the acceleration increases, the S-TENG turns on the MEMS switch, and the wireless transmitter transmits an alarm signal with the energy from E-TENG, using only 0.64 mJ. Using TENGs simultaneously as an energy source and a sensor, the SAVWS provides a self-powered vibration monitoring solution for unattended environments and shows extensive applications and great promise in smart factories, autonomous driving, and the Internet of Things.