Thin-film PZT based monolithic translational/tilt micro-scanner for vertical cross-sectional imaging with dual axes confocal endomicroscope

Abstract

A multi-axis micro-scanning mechanism actuated by thin-film PZT is presented for optical cross-sectional imaging in dual axes confocal microscopy. The actuator achieves large translational vertical displacement (200 μm at 18 Vdc) by active piezoelectric forcing and large rotational horizontal scanning (±6o mechanical angle at >3 kHz) by resonance of passive oxide cantilevers. Devices are produced from SOI wafers using vertical silicon dioxide barrier trenches for robust encapsulation of structural silicon during XeF2 release of PZT bending beams. The resulting monolithic micro-scanner is compatible with endomicroscopic systems for acquiring vertical cross-sectional images from tissue.