The Phase Transformation of Silicon Assessed by an Unloading Contact Pressure Approach

Abstract

Silicon is of great economic importance for the semiconductor industry as well as of academic interest because of its high-pressure phase transformations. These transformations also occur during the indentation of silicon. To further investigate these transformations, a modified method using the continuous stiffness measurement (CSM) during unloading is presented in this work. The use of the CSM signal allows directly calculating the mean contact pressure while unloading. The measurements will be compared to conventional indentation tests and data from high-pressure cell experiments reported in the literature. Furthermore, the influence of constant load holding segments on the phase transformation during unloading is investigated.