Micro- and nanomanipulation inside the SEM

Abstract

Based on individual piezodriven nanomotoric units a nanomanipulation platform is integrated into a low voltage field emission SEM (Zeiss Gemnini). The instrumentation allows the controlled movement of individual particles (ca. 50 nm), the cutting of ultrathin polymer membranes or the deformation of hollow polymer spheres with an ultrathin elastic membrane (ca. 20 nm thickness). Interaction with the objects can be done under direct microscopic observation. Imaging up to 20000 x magnification without any detectable influences of external vibrations guarantees the precise manipulation. Under appropriate imaging conditions (e.g. using low energy electrons) specimen charging can be avoided and even uncoated glass tips can be used to manipulate samples. © 2008 IOP Publishing Ltd.