Plasma polymerization of hexamethyldisilazane

Abstract

The chemical structure, density, and deposition rate of hexamethyldisilazane plasma polymer were investigated in terms of reaction conditions, such as discharge power (W) and mass flow rate (Fm). The importance of the specific energy per mass (W/Fm) as the major controlling parameter of plasma polymerization was confirmed in this study. A notable infiuence of W/Fm on the chemical structure corresponded with the changes in density and deposition yield of plasma polymer. Deposition rate equation was proposed from the simplified model of plasma polymerization. Regression analysis of the experimental data supported the equation. © 1990 The Society of Polymer Science, Japan.