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Thermopile IR Sensor Arrays

  • Fedirko V
  • Fetisov E
  • Khafizov R
  • et al.
Springer International Publishing, (2018), 39-48
DOI: 10.1007/978-3-319-62870-7_5
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Abstract

Thermopile thermo-sensitive element for infrared (IR) sensor array and its optimization is considered. A concept of thermal infrared sensor array based on the micro (nano)-electromechanical system (MNEMS) with nonstationary Seebeck effect is discussed. Infrared absorption of non-stoichiometric silicon nitride thin films has been studied in the region of wavenumbers 500-7500 cm −1. The estimated absorption about 64% is found for 1300 nm layer thickness, which is good enough for thermal sensor.

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APA

Fedirko, V. A., Fetisov, E. A., Khafizov, R. Z., Rudakov, G. A., & Sigarev, A. A. (2018). Thermopile IR Sensor Arrays. In Proceedings of the Scientific-Practical Conference “Research and Development - 2016” (pp. 39–48). Springer International Publishing. https://doi.org/10.1007/978-3-319-62870-7_5

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