Low-Loss Planar Optical Waveguides Fabricated in SIMOX Material

Abstract

Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss has been studied. Waveguides with guiding layer thickness of approximately 6 μm, have been measured, and a lowest loss, which is of the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 μm, at a measurement wavelength of 1.523 μm,. © 1992 IEEE.