Abstract
A 0.5V ultra-low voltage Arm Cortex-M4F MCU in a 22nm FDSOI technology with 512kB SRAM and 140MHz operating frequency with $11.5~\mu {\mathrm{ W}}/{\mathrm{ MHz}}$ is presented. An all-digital closed-loop continuous adaptive body biasing with individual P and N compensation and low ripple less than 30mV enables target performance from -40°C to 125°C and over full process corner range. The MCU has been implemented using an adaptive body bias aware implementation flow, which considers the corner tightening during implementation and sign-off for improved power, performance and area.
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Hoppner, S., Eisenreich, H., Walter, D., Scharfe, A., Oefelein, A., Schraut, F., … Prengel, H. (2020). Adaptive Body Bias Aware Implementation for Ultra-Low-Voltage Designs in 22FDX Technology. IEEE Transactions on Circuits and Systems II: Express Briefs, 67(10), 2159–2163. https://doi.org/10.1109/TCSII.2019.2959544
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