Preparation of Nearly Stoichiometric superconducting Y-Ba-Cu-O Films by an MOCVD Technique Using Ozone

Abstract

Superconducting Y-Ba-Cu-O films of nearly stoichiometric composition (Y:Ba:Cu=1:2:3.6) were prepared by an MOCVD technique on MgO(100) infstrates at 650°C without postannealing. By introducing ozone into the reactor, we obtained a film with higher zero resistive temperature (75 K) and better surface morphology and c-axis orientation, compared to a film of the same composition prepared without ozone. © 1990 IOP Publishing Ltd.