Status quo and future trends of aberration correction in electron microscopy

Abstract

Aberration correted electron microscopy (ACEM) has improved resolution to sub-angstrom regime, which allows us to study materials with light elements, with dopants and defects, and with electronic, magnetic and optical functions. Developments of ACEMs and applications that undertaken in the world are briefly reviewed, being focused particularly on 50 pm resolution STEM and TEM instrumentation.