Electronic Structure Analyses Using Electron Energy-Loss Spectroscopy in Transmission Electron Microscope

Abstract

Electron energy-loss spectroscopy (EELS) in transmission electron microscopy (TEM) is briefly reviewed. The outline and a few experimental results of elemental and chemical analysis are shown. Recent progress in TEM-EELS, such as monochromator for high energy resolution and spectrum imaging, are also presented. 1.‚Í ‚ ¶ ‚ß ‚É " §‰ß "dŽqOE° "÷‹¾-@(Transmission Electron Microscopy : TEM)‚É "dŽqƒGƒlƒ‹ƒM •[ '¹ Ž¸•ª OEõ-@(Electron Energy-Loss Spectroscopy : EELS)‚ð 'g ‚Ý• ‡‚í ‚¹ ‚½‚¢‚í ‚ä ‚éTEM-EELS ‚Å‚Í,TEM‚Ì •‚ ‚¢‹óŠÔ •ª ‰ð "\ ‚ðŠˆ‚©‚µ‚Ä,ƒi ƒm ƒ••[ ƒ^•[ ˆÈ ‰º ‚Ì-Ì ˆae‚©‚ç"dŽq•ó'Ô‚ÉŠÖ ‚· ‚é 'mOE© ‚ª "¾‚ç‚ê ‚é.1)21TEM-EELS‚Í OEà ‚-‚©‚ç•s ‚í ‚ê ‚Ä‚¨‚è‚Ä‚¨‚è,1940"N'ã •‰ "ª ‚É‚Í ‚· ‚Å‚É ƒvƒ‰ ƒY ƒ‚ ƒ"ƒ•ƒX ƒs•[ ƒN ‚Ì ŠÏŽ@ ‚â,"à Šk-ã ‹NƒX ƒyƒNƒgƒ‹‚ð-p ‚¢‚½OE³ 'f •ª •Í ‚È‚Ç•ae‹ì "I ‚ÈOE¤ ‹ † ‚ª •s ‚í ‚ê ‚Ä‚¢‚½.‚» ‚Ì OEã‚à '…•X‚AE OE¤ ‹ † ‚Í •i ‚ß ‚ç‚ê ‚Ä‚¢‚½‚ª "Á‚É‚±‚Ì10•`20"N,•¨ Ž¿‰ð •Í ‚Ì ƒc•[ ƒ‹ ‚AE‚µ‚Ä'• 'u •E ‰ð •Í Žè-@ ‚AE‚à"ò-ô"I ‚É"-"W ‚µ‚½.TEM-EELS‚ÉŠÖ ‚· ‚é "ü-å•u•À‚ª,•Å ‹ß(2002"N)-{ Ž•‚ŘA•Ú3),4)‚³ ‚ê ‚Ä‚¢ ‚é‚Ì ‚Å.OEn"• "I ‚ȉð •à ‚Í ‚»‚¿ ‚ç ‚ðŽQ •AE‚³ ‚ê ‚½‚¢.‚± ‚±‚Å‚ÍTEM-EELS‚Ì ŠT-v ‚ð•q‚× ‚½OEã,"Á ‚É •Å‹ß•i '» ‚ª '˜ ‚µ‚¢,ƒG ƒl ƒ‹ƒM •[ •ª ‰ð "\ ‚Ì OEü •ã ‚AE,ƒCƒ••[ ƒW ƒ"ƒO ‹Z•p ‚Ì •i "W ‚ɂ‚¢‚Ä,ƒI ƒ€ƒjƒoƒX "I ‚É•Ð‰î ‚· ‚é.‰ð•Í Žè-@ ‚ɂ‚¢‚Ä‚Ì •i "W ‚Í,-{ "Á•W • † ‚Ì •a OEû Ž•‚É‚ae‚é ‰ð •à ‚ð‚²-‚¢‚½‚¾‚«‚½‚¢. 2.TEM-EELS‚Ì ŠT-v 2.1"d ŽqƒG ƒl ƒ‹ ƒM •[ '¹ Ž¸ƒX ƒyƒNƒgƒ‹ ‚ÉOE© ‚éTEM-EELS ‚Ì "Á'¥ TEM-EELS‚Å‚Í,•" •\ •` •".•SkV‚É ‰Á '¬ ‚µ‚½"dŽq‚ð"-OE ‰» ‚µ‚½ŽŽ-¿ ‚É•AE ŽË‚µ," § ‰ß ‚µ‚½"dŽq‚Ì ƒGƒlƒ‹ƒM •[ ‚𕪠•Í ‚· ‚é.ŽŽ-¿ ‚ð" §‰ß ‚· ‚é •Û‚É,ƒv ƒ‰ ƒY ƒ‚ ƒ"-ã ‹N,ƒo ƒ" ƒh-â'J ˆÚ-ã ‹N,‚ ‚é ‚¢‚Í "àŠk"dŽq‚ð-ã ‹N‚µ‚½OE‹ ‰Ê Ž¸‚Á‚½ƒGƒlƒ‹ƒM •[ ‚ðOEv 'ª ‚µ ,"d Žq•\ '¢ ‚É‚©‚©‚é 'mOE© ‚ð"¾‚é ‚Ì ‚ªTEM-EELS ‚Å‚ ‚é.•}1‚É "TOE^ "I ‚È"dŽqƒGƒl ƒ‹ƒM •[ '¹ Ž¸ƒXŽ¸ƒX ƒyƒNƒgƒ‹ (ŽŽ-¿ ‚Íh-BN)‚𠎦‚·.‰¡ Ž²‚Í ƒGƒlƒ‹ƒM •[ '¹ Ž¸-Ê ‚Å,‰E ‚É •s ‚-‚Ù‚Ç" §‰ß "dŽq‚Ì ƒGƒlƒ‹ƒM •[ '¹ Ž¸-Ê ‚ª 'å ‚«‚¢.ƒXƒyƒNƒg ƒ‹‚Í ƒGƒl ƒ‹ƒM •[ '¹ Ž¸-Ê ‚ª •" •\eV'ö "x ‚Ü‚Å‚Ìlow loss-Ì ˆae‚AE,•"•\eVˆÈ •ã ‚Ìcore loss-Ì ˆae‚AE ‚É'å •Ê‚³ ‚ê ‚é.•"eV ‚Ì ‰Â Ž‹OEõ-Ì ˆae‚©‚ç,•"keV‚Ì "îX•ü-Ì ˆae‚Ü‚Å‚³ ‚Ü‚´‚Ü‚È‚Ü‚´‚Ü‚È •}1h-BN‚Ì ƒGƒl ƒ‹ ƒM•[ '¹ Ž¸ƒXƒyƒNƒgƒ‹Ž¸ƒXƒyƒNƒgƒ‹.(TheEEL spectrum of h-BN.)-ã ‹N‰ß 'ö ‚ð'² ‚× ‚ç‚ê ‚é‚Ì ‚Í,‚Ù ‚©‚Ì Žè-@ ‚É‚Í ‚ ‚Ü‚èOE© ‚ç‚ê ‚È‚¢"Á'¥ ‚Ì1‚ ‚Å‚ ‚è,‚» ‚ê ‚¼‚ê ‚Ì •Hƒl ƒ‹ƒM •[-Ì ˆae‚Å"¾‚ç ‚ê ‚é•î •ñ ‚Í '½-l ‚Å‚ ‚é. Low loss-Ì ˆae‚Å‚Í 'e •«ŽU-• "dŽq(ƒ[ ƒ•ƒ•ƒX "dŽq)‚â ƒvƒ‰ ƒY ƒ‚ ƒ"‚ð-ã ‹N‚µ‚½"dŽq‚ª ŠÏŽ@ ‚³ ‚ê ‚é.Low lossƒXƒyƒNƒgƒ‹ ‚Í '¹ Ž¸ŠÖ •"Im(ˆê1/ƒÃ)‚É ‚ae‚è"Á'¥ ‚¯ ‚ç‚ê ‚Ä‚¨‚è‚Ä‚¨‚è.‰¿ "dŽq ‚ ‚é‚¢ ‚Í "` "±"dŽq‚AE "üŽË "dŽq‚AE ‚Ì 'ŠOEÝ •ì •ì ‚ʼnð Žß‚³ ‚ê ‚é.3) •¡ 'f-U "d-¦ ‚âƒoƒ"ƒhƒM ƒƒƒbƒv‚Ì OEv 'ª ‚È‚Ç‚ª ‰Â "\ ‚Å‚ ‚é."ñ 'e •« ŽU-• ‚· ‚é•p"x‚Í ƒ{ƒAƒ\ ƒ"•ª •z ‚É•] ‚¤‚Ì ‚Å," §‰ß "dŽq' † ‚Ì 'e •«ŽU-• "dŽq‚Ì Š"• ‡‚©‚ç,ŽŽ-¿ ‚Ì-OE OEú ‚ª('S "ñ'e •«ŽU-• ‚Ì •½‹Ï Ž©-R •s'ö ‚É'Î ‚· ‚éŠ"• ‡ ‚AE ‚µ‚Ä)‹• ‚ß ‚ç‚ê ‚é. Coreloss-̈ae‚Å‚ÍB‚¨‚ae‚ÑN‚Ì̈ae‚Å‚ÍB‚¨‚ae‚ÑN‚Ì "àŠk"dŽq(1s,KŠk)‚ð-ã ‹N ‚µ‚½"dŽq(ƒRƒAƒ•ƒX "dŽq)‚ª ƒGƒbƒW •ó ‚ÉŠÏ Ž@ ‚³ ‚ê ‚é. ƒRƒA ƒ•ƒX ƒGƒbƒW ‚ ‚é ‚¢ ‚ÍK(L ,M.•E •E)ƒG ƒbƒW ‚AE OEÄ ‚Î ‚ê ‚é. "àŠk•€ˆÊƒGƒlƒ‹ƒM •[ ‚Í OE³ 'f OEÅ-L ‚È‚Ì ‚Å,OE³'f •ª •Í ‚ª ‰Â "\ ‚Å ‚ ‚é.‚Ü ‚½,‰» Šw OE‹• ‡•ó 'Ô‚ª •Ï ‰» ‚· ‚é ‚AE "àŠk•€ ˆÊƒGƒl ƒ‹ƒM •[ ‚ª(-á ‚¦ ‚Î •"eV)ƒV ƒt ƒg‚µ ,ƒX ƒyƒNƒgƒ‹‚Å‚Í ƒPƒ~ƒJƒ‹ƒV ƒt ƒg‚AE‚µ‚ÄOE» ‚ê ‚é ‚Ì ‚Å,‰» Šw OE‹• ‡•ó 'Ô‚à‰ð •Í ‚Å‚«‚é.Core "ú-{OE‹ •»Šw‰ï Ž• 'ae47Šª 'ae1• †(2005) 67