Spray pyrolysis technique; High-K dielectric films and luminescent materials: A review

4Citations
Citations of this article
47Readers
Mendeley users who have this article in their library.

Abstract

The spray pyrolysis technique has been extensively used to synthesize materials for a wide variety of applications such as micro and sub-micrometer dimension MOSFET's for integrated circuits technology, light emitting devices for displays, and solid-state lighting, planar waveguides and other multilayer structure devices for photonics. This technique is an atmospheric pressure chemical synthesis of materials, in which a precursor solution of chemical compounds in the proper solvent is sprayed and converted into powders or films through a pyrolysis process. The most common ways to generate the aerosol for the spraying process are by pneumatic and ultrasonic systems. The synthesis parameters are usually optimized for the materials optical, structural, electric and mechanical characteristics required. There are several reviews of the research efforts in which spray pyrolysis and the processes involved have been described in detail. This review is intended to focus on research work developed with this technique in relation to high-K dielectric and luminescent materials in the form of coatings and powders as well as multiple layered structures.

Cite

CITATION STYLE

APA

Falcony, C., Aguilar-Frutis, M. A., & García-Hipólito, M. (2018, August 19). Spray pyrolysis technique; High-K dielectric films and luminescent materials: A review. Micromachines. MDPI AG. https://doi.org/10.3390/mi9080414

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free