Abstract
The effect of deposition temperature on the microstructures and resistive switching properties of Fe-doped SrTiO3 (Fe-STO) films deposited via magnetron sputtering has been investigated. The as-deposited Fe-STO films change from amorphous to polycrystalline when the deposition temperature increases to 600 °C, but 800 °C-deposited Fe-STO films exhibit cracked surface morphologies with Sr-rich nanosheet segregation. Fe-STO films deposited at ≤600 °C exhibit reversible bipolar resistive switching behaviors with ultra-low switching voltages of
Cite
CITATION STYLE
Jiang, X., Wei, M., Chan, C. H., Wang, Y., Lai, R., Wang, J., … Qiu, X. (2020). Effect of deposition temperature on ultra-low voltage resistive switching behavior of Fe-doped SrTiO3 films. Applied Physics Letters, 116(10). https://doi.org/10.1063/1.5123254
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
