Functional Performance of Silicon with Periodic Surface Structures Induced by Femtosecond Pulsed Laser

Abstract

A micro/nano surface structure can produce specific properties, such as super hydrophilic-ity, low reflectance property, etc. A femtosecond laser-induced periodic surface structure is an important manufacturing process for the micro/nano structure. This research investigated the effects of scanning intervals and laser power on the surface morphology, wetting properties, and reflectance properties of LIPSS based on a silicon wafer. The results showed that the laser power had a significant effect on the surface morphology and wettability of silicon. With the increase of laser power, the surface roughness, etching depth and surface hydrophilicity increased. However, the laser power had little effect on the surface reflectance. The scanning interval had a great influence on the wettability and reflectance property of silicon. With the decrease of the scanning interval, the surface hydrophobicity and reflectance of silicon first decrease and then remain basically stable from 10 µm.