Modelling and characterization of columnar growth in evaporated films

Abstract

The columnar structure found in thin evaporated films deposited at low temperatures has been accurately reproduced using computer simulations of sequentially deposited hard disc with limited surface diffusion. Empirical relationships between column angle and deposition angle have been found; however, no clear analytical description of the process exists. This work provides simple expressions based on geometrical arguments which describe column angle and density as a function of deposition angle for films evaporated under conditions allowing only limited surface diffusion. The expressions agree well with measured results from evaporated films and hard disc simulations. © 1993.