A highly sensitive and fast-responding SnO 2 sensor fabricated by combustion chemical vapor deposition

Abstract

Highly porous and nanostructured SnO: thin-film gas sensors with Pt interdigitated electrodes have been fabricated via a combustion chemical vapor deposition process. The SnO 2 films were less than 1 μm thick and consisted of nanocrystallines smaller than 30 nm. At 300°C, the as-prepared SnO 2 gas sensor showed a sensitivity of 1075 to 500 ppm ethanol vapor, and the corresponding response time and recovery time were 31 and 8 s, respectively. The extrapolated low detection limit appears to be below 1 ppm. Consequently, the as-fabricated sensor demonstrated significant improvements over those reported in the literature. These highly sensitive, fast-responding, and low-cost SnO: sensors could have many practical applications. © 2005 American Chemical Society.