A compact capacitive pressure transducer

Abstract

A sensitive Straty-Adams type strain gauge has been developed for precise pressure measurements at ultra-low temperatures and high magnetic fields. The new design, without using any plastic material for the insulation spacer, can avoid the remarkable pressure dependence at low temperatures observed in previous designs. The sensitivity can be easily modified by changing the thickness between the two diaphragms without reconstruction of the sensor after it has been made. The sensitivity, accuracy and reproducibility have been tested at low temperatures and in high magnetic fields. The general design can be applied to a variety of precise pressure measurements. © 2009 IOP Publishing Ltd.