Asymmetric fan-shape-electrode for high-angle-detection-accuracy tactile sensor

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Abstract

This paper reports an up to 95.9% angle detection accuracy enhancement for capacitive tactile sensors, which entails asymmetric and intentionally shifted electrodes. The rotational shift between two electrodes of a capacitor that greatly contributed to angle detection errors was theoretically analyzed and examined by experiments with simulations. The asymmetric electrodes containing one fan- and one square-shape in capacitors reduced unexpected and rotational-shift induced errors, by keeping the same overlap area of the electrodes. The minimal angle detection resolution was improved from 5.8° to 0.3°, making the tactile sensor practical and reliable in artificial skins.

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APA

Chuang, S. T., Chen, T. Y., Chung, Y. C., Chen, R., & Lo, C. Y. (2015). Asymmetric fan-shape-electrode for high-angle-detection-accuracy tactile sensor. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 2015-February, pp. 740–743). Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/MEMSYS.2015.7051064

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