Evaluation on mechanical property of ta205 thin film by micro scale bending test

Abstract

In order to examine the elasto-plastic deformation property of a Ta 20 5 thin film, a bending experiment is carried out using a micro-cantilever specimen fabricated by means of a focused ion beam. The load-displacement curve shows evident non-linear behavior, and the specimen breaks at P = 478.6mu;N. The plastic constitutive equation of the Ta 20 5 thin film is inversely derived by finite element method (FEIVI) analyses. It also evaluates the fracture strain of 3.1 x lo 2The material properties obtained by indentation include a depth-dependent error due to the loading tip configuration and the deformation constraint by the substrate. The bending test, which has no effect of the deformation constraint, is effective for specifying the mechaffical properties of thin films.