Elucidating the asymmetric behavior of the discharge in a dual magnetron sputter deposition system

Abstract

A magnetron discharge is characterized by drifts of the charged particles' guiding center, caused by the magnetic field, in contrast to unmagnetized discharges. Because of these drifts, a pronounced asymmetry of the discharge can be observed in a dual magnetron setup. In this work, it is found that the shape of the discharge in a dual magnetron configuration depends on the magnetic field configuration. In a closed configuration, strong drifts were observed in one preferential direction, whereas in a mirror configuration the deflection of the discharge was not so pronounced. Our calculations confirm experimental observations. © 2011 American Institute of Physics.