Electron probe microanalysis of Ni-silicides at low voltage: Difficulties and possibilities

Abstract

Interest in the use of EPMA at low voltage has grown considerably in recent years, mainly because of the availability of electron-beam instruments equipped with field-emission guns. However, EPMA at low voltage is marred by both experimental and analytical problems which may affect the accuracy of quantitative results. In the case of the analysis of transition elements, both the emission and absorption of X-rays are still poorly understood when they originate from electron transitions involving the partially filled 3d-shell. This is the case for the most intense Lα (L3-M5 transition) and Lβ (L2-M4 transition) lines. In this communication, we point out anomalies which appear to afflict the accuracy of EPMA of Ni-silicides using the Ni-Lα X-ray line and we discuss possible solutions.