Low temperature growth of Zn-ZnO microspheres by atomic hydrogen assisted-HFCVD

Abstract

Using ZnO pellets and molecular hydrogen as solid source and reactant gas respectively, Zn-ZnO microspheres were grown by hot filament chemical vapor deposition in low temperature growth regime. The presence of Zn-ZnO microspheres was confirmed by scanning electron microscopy (SEM) technique. It is suggested that microspheres formed in the gas phase by nucleation of Zn atoms. Energy dispersive spectroscopy (EDS) and X-ray diffraction (XRD) measurements suggest that microspheres were only superficially oxidized by water vapor species. © Published under licence by IOP Publishing Ltd.