Design of Piezoresistive Sensor using FEA in ANSYS

Abstract

Piezoresistive pressure sensors are widely used in various fields such as in industries, automobiles, medical applications and many others. To get proper input from the sensors we must have a good sensor having good sensitivity in every type of environmental conditions. The behavior of the sensor also depends upon its thickness, area, material properties etc. This paper is based on the piezoresistive micro pressure sensor having greater sensitivity made of silicon material. Using finite element analysis (FEA) and ANSYS the sensitivity is determined on different dimensions with different loading conditions. The piezo resistors of silicon material are arranged in different patterns and the sensitivity of each plate is determined by having all the results best design for the sensor is achieved.