A comparison simulation of fixed-fixed type MEMS switches

Abstract

In the present work pull-in voltage of fixed-fixed end type MEMS switches with variative electrostatic area has been calculated using a distributed model and applying a full nonlinear finite difference discretizing method. The governing nonlinear differential equation has been derived using of the variational principle for multi domain electromechanical coupled system. The numerical results of the beam with variative electrostatic area with the results of Coupled-Domain Finite Element method have been compared and very good agreement has been achieved. © 2006 IOP Publishing Ltd.