Design and simulation of polyisobutylene/silicon nitride for detection of gas sensing

Abstract

This work describes the design analysis of multi-layer structure of surface acoustic wave (SAW) based MEMS sensors for the evaluation of tetrachloroethene and trichloroethylene gases. The structure PIB/ Si3N4 /LiNbO3 was simulated in COMSOL M utliphysics 5.4 using Finite element method (FEM). The gas sensing response was observed at different temperature ranges. The resonant frequency of SAW device sensors was evaluated, and the simulation results were performed by COM SOL software after exposing 100 ppm concentration of tetrachloroethene and trichloroethylene gases. It was observed that the frequency shift was found to decrease after exposing of gases. The effects on frequency response with change in thickness layer, temperature and pressure were also investigated.