III-V/Si integration technology for laser diodes and Mach-Zehnder modulators

Abstract

This paper reviews a technology to heterogeneously integrate III-V semiconductors on a Si platform for the laser diodes and high-efficiency Mach-Zehnder modulators (MZMs) of optical transceivers. Membrane III-V semiconductor films provide efficient optical coupling between the III-V semiconductor devices and widely developed thin Si waveguide circuits. The membrane laser diode shows a fiber coupled output power from the Si waveguide of 4.6 mW and single-mode lasing with a side-mode suppression ratio of 49 dB. In addition, the high-efficiency MZM with a 700 μm long membrane InGaAsP/Si metal-oxide-semiconductor capacitor phase shifter shows a V π L of 0.09 Vcm, insertion loss of around 2 dB, and an eye opening at for 32 Gbit s-1 nonreturn-to-zero signal with pre-emphasis signal inputs.