Conference Proceedings

The Paths To Subhalf-Micrometer Optical Lithography

  • Lin B
  • Lin B
Optical/Laser Microlithography (1988) 0922 256-269
DOI: 10.1117/12.968423
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Lin, B. J., & Lin, B. J. (1988). The Paths To Subhalf-Micrometer Optical Lithography. In Optical/Laser Microlithography (Vol. 0922, pp. 256–269). SPIE. https://doi.org/10.1117/12.968423

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