Development and experimental validation of a versatile prototype Swing Arm Profilometer for measuring optical surfaces

Abstract

A versatile prototype Swing Arm Profilometer (SAP) is developed and experimentally validated in the Institute of Optics and Electronics (IOE), Chinese Academy of Sciences (CAS). The configurations for the SAP are introduced. The measurement principles for measuring plano, spherical and aspherical mirrors are given. Four experiments are performed on the prototype SAP and validated by interferometric results. The measurement uncertainty for the current prototype SAP is 0.5 micron (rms).