Development and characterization of an improved Ti-Zr-V thin-film getter with 3D porous nano-scaffolds

Abstract

In order to break through the structural limitation of 2D planar film and develop getter with large specific surface area (SSA), the 3D Ni-nanoarray based Ti–Zr–V film getter was prepared to effectively increase the SSA and finally improve its adsorption performance. The morphology and adsorption performance of Ti–Zr–V films deposited on Ni-based nano-scaffold and silicon substrate were studied by scanning electron microscopy, thermogravimetric analysis and hydrogen adsorption test. The gettering properties are found to be directly dependent on the deposited thickness of Ti–Zr–V film. The results show that the 80-nm-thick Ti–Zr–V film can maintain the porous structure of the original Ni nanoarrays and has the largest adsorption rate (1.274 × 10−2 mg/(s·g)) and adsorption capacity (0.0587 mg) in the thermogravimetric analysis experiment. Under the same preparation and activation conditions, the H2 adsorption rate and adsorption capacity of 3D Ni-nanoarray based Ti–Zr–V film are about three times and twice that of Ti–Zr–V film on silicon substrate, respectively. This is because the increase in SSA promotes the gas adsorption on the getter surface. The study indicates that the application of porous nanoarray as scaffold for getter film is an effective way to improve the adsorption performance.